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Quartz Material
Material Supplier Model Product
Quartz Tosoh N, NP Quartz Window
Chamber wall
Top Ring
Pumping Liner
Confinement Ring
etc.
Momentive GE214
GE144
Quartz Dome
Boat
Cover Ring
A7 Ring, etc.
Heraeus HSQ,
TSC
Quartz Tube
Dome
Silicon Material
Material Single Crystal Silicon
Purity(%) 6N ↑
Type / Dopant P - Boron
Size 8 ~ 12 inch
Resistivity(Ω.cm) Low Resistivity -- < 1Ω
Normal Resistivity -- 1 - 10Ω
High Resistivity -- 60 - 90Ω
Si Focus Ring 6, 8, 12
Si Electrode Hole Diameter 0.45/0.5
Surface condition Lapping
Etching
Polishing
Ceramic Material
Material Al203 99.7% ↑
Density 3.96 × 103 Kg / ㎥
Hardness 1500 Kg / ㎥
Dielectric Constant 9.9 1MHz
Thermal Conductivity 20℃ 32 W / m.K
Heat Shock Resistivity 250 T. ℃
Average powder grain size 0.2 ~ 0.4㎛ Diameter
Maximum Using Temperature 1700 -